RF power for plasma processing

Generators, matches, sensors and filters. One RF path.

CVS designs and builds RF power equipment for PECVD, etch, diffusion, ion source and sputter tools in semiconductor, photovoltaic and display manufacturing.

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300 kHz – 13.56 MHzGenerator frequencies

0.9 – 5.5 kWGenerator power

<2 sMatch tune time

12 monthsWarranty

How the products fit together

The RF delivery path

Generator

Barracuda · Snapper

Regulated RF power, CW or pulsed

Sensor (option)

Phase-X

Measures V, I, phase and load impedance

Match

Cruiser Solo · Duo

Transforms the plasma load to 50 Ω

Chamber

Plasma load

Electrode, pedestal, showerhead

RF filter

Heater · E-chuck · Faceplate filters

Keep RF off the chamber's heater and chuck supply lines

Products

Product families

Connectors, communication protocol, tuning range and enclosure size are configured to the customer's tool.

RF generator · 13.56 MHz

Barracuda

Class E generator with CW and pulsed output as standard. Up to 5.5 kW in a half-rack, water-cooled chassis.

1.5 / 3 / 5.5 kWRated output

150 Hz – 50 kHzPulse frequency

<10 msRF-on response

≤ −45 dBcHarmonics

Full specifications

Parameter	1.5 kW	3 kW	5.5 kW
Part number	M-719001	M-719002	M-719003
Frequency	13.56 MHz ±0.005%
Delivered power, 2:1 / 3:1 VSWR	1125 / 650 W	2000 / 1200 W	3350 / 1900 W
Maximum reflected power	300 W	600 W	1000 W
Setpoint accuracy	±1% of setpoint or ±0.1% of rated power, whichever is greater
Low-power accuracy (HALO, High Accuracy Low Output)	±1%; ±0.25 W below 25 W	—	±1%; ±0.25 W below 25 W
Pulsing	Duty 10–90% in 1% steps · min. on-time 10 µs · rise/fall <2 µs · sync / CEX supported
AC input	187–229 VAC, 3-phase, 208 VAC nominal · PF 0.96 · efficiency 60% typical
Line current, full power	6.9 A/phase	14 A/phase	26 A/phase
Connectors (AC · RF)	Harting Han-Q 5/0 · HN female		Harting Han-Modular 40 A · L29 (7/16) female
Communication	Analog, RS-232, Ethernet or EtherCAT, chosen at order
Cooling water	7.6 L/min min.		11.4 L/min min.
Water temp. · pressure	+35 °C max. · 2.0–6.9 bar
Size · weight	133 × 216 × 485 mm, half-rack · 20.5 / 22 / 24 kg

RF generator · 300–450 kHz

Snapper MF-900 / MF-1250

Low-frequency generator with a built-in 7-tap output transformer that matches low-impedance plasma loads. Frequency adjustable from 300 to 450 kHz.

900 / 1250 WRated output

10–125 ΩOutput impedance

±1% or ±2 WRegulation

2U19-inch rack

Full specifications

Parameter	MF-900	MF-1250
Part number	M-718001	M-718002
Power range	9–900 W	10–1250 W
Output impedance	10–50 Ω, 7 taps	10–125 Ω, 7 taps
Maximum reflected power	<250 W	<280 W
Output voltage · current	300 V max. (50 Ω) · 6 A max.
AC input	180–230 VAC, 1-phase, 7 A max.	180–230 VAC, 3-phase, 6.2 A typical
Connectors	RF: Type N female · User port: 25-pin D-sub
Size · weight	88 × 434 × 660 mm · 13.6 kg max.

Automatic match networks

Cruiser Solo and Cruiser Duo

Solo: single-frequency 13.56 MHz matches from 1.6 to 10 kW. Duo: two matches with one output, 13.56 MHz with 400 kHz or 2 MHz. Tuning range configured to the chamber. Optional built-in Phase-X sensor.

<2 sTune time

<1 sFrom preset

1.6 – 10 kWSolo input power

13.56 MHz ±5%Frequency band

Full specifications

Model	Part number	Rating	Size · weight · cooling
Solo 1.6 kW	M-715001	3000 V_pk · 35 A_rms	210 × 270 × 315 mm · 5.5 kg · fan
Solo 3 kW	M-715002	4000 V_pk · 35 A_rms	210 × 270 × 315 mm · 5.5 kg · fan
Solo 5.5 kW	M-715003	6000 V_pk · 80 A_rms	210 × 270 × 315 mm · 6 kg · fan
Solo 10 kW	M-715004	10 000 V_pk · 80 A_rms	210 × 270 × 365 mm · 6.2 kg · water + fan
Duo 13.56 MHz + 400 kHz	M-716001	3000 W + 1000 W	210 × 270 × 315 mm · 10 kg
Duo 13.56 MHz + 2 MHz	M-716002	3000 W + 5000 W	203 × 356 × 406 mm · 14 kg
Communication	Analog, RS-232, Ethernet or EtherCAT, chosen at order
Environment	−25 to +55 °C, 10–90% RH

In-line V-I sensor · 400 kHz – 13.56 MHz

Phase-X

Measures voltage, current, phase and load impedance at the chamber in real time. A microsecond-level TTL trigger signal gives the tool fast feedback for closed-loop control, including an endpoint signal for low open-area etch.

1–1000 V_rmsVoltage range

0.1–35 A_rmsCurrent range

±0.3°Phase accuracy

±2%Power accuracy, 0–30°

Full specifications

Parameter	13.56 MHz	400 kHz
Part number	M-717001
Voltage accuracy	±0.2 V or 2%	±0.6 V or 2%
Current range · accuracy	0.1–35 A · ±0.02 A or 2%	0.1–10 A · ±0.06 A or 2%
Phase accuracy (≥10 V, ≥1 A)	±0.3°	±0.4°
Power accuracy by phase angle	±2% to ±4% (0–80°)	±3% to ±5% (0–80°)
Interface	RS-232 · CVS VFP (virtual front panel) software · TTL trigger output
RF connectors	HN female · 1000 V_rms, 35 A

Two-channel RF filter with E-chuck channel

LC low-pass filters · 400 kHz and 13.56 MHz

RF filters

Keep RF energy off heater, electrostatic chuck and faceplate supply lines. All models monitor common-mode noise and protect against over-temperature.

≥30 dBat 13.56 MHz

≥10 dBat 400 kHz

1 – 3Channels

2000 VDCWithstand, 1 min

Full specifications

Parameter	1CH Heater	2CH E-chuck	Faceplate
Part number	M-721001	M-721004	M-721003
Heater supply	200–230 VAC · 16 A · 3000 W	200–230 VAC · 22 A · 4500 W	200–230 VAC · 16 A · 3000 W
E-chuck channel	—	2000 V, 40 mA	—
Insulation resistance	≥1000 MΩ
Operating ambient	−25 to +55 °C

Company

CVS Precision Technologies

CVS Precision Technologies (上海世炜科技有限公司) designs and builds RF power conversion equipment in Shanghai. Our products run on PECVD tools in production, and they replace installed Advanced Energy Apex and PDX units. International sales: CVS Precision Technologies, Ltd., Colorado, USA.

2026Founded

1500 m²Plant, Fengxian, Shanghai

40 unitsInstalled on 10 PECVD tools

Jiangyin · WuxiService locations

Ordering and service

Service

12 monthsWarranty from shipment

8–12 weeksStandard lead time

14 daysRepair turnaround

EN · 中文Operation manuals, outline drawings, 3D models and test reports on request

Contact

Talk to an RF applications engineer about your chamber.

Send the tool model, chamber process and the RF unit you use today. We reply within one working day.

Sales

sales@cvs-precision.com

Phone

+86 139 2654 4148

Factory

上海世炜科技有限公司
3F, Building 9, Block 1, No. 288 Huifeng North Road
Fengxian District, Shanghai, China